Rebuilt
MRC 603 Model II Sputter/Etch System - SOLD
Description: Rebuilt MRC 603 Model II Sputter/Etch System
Features:
- Dual Level Loadlock - Uses 13" Square Pallets
- Automated Computer Control - Recipe Driven
- RF/DC Sputter Capability
- RF Etch Capability
- 10 KW DC Supply
- 1.5 KW RF Supply
- 3 RF/DC Planar Magnetron Cathode Assemblies
- MKS Capacitance Manometer for Process Gas Pressure Measurement w/ Auto-Pressure Control
- CTI Cryo-Torr 8 High Vacuum Pump w/ Air Cooled Compressor
- Alcatel Rough Vacuum Pump
- Total Rebuild, with Options or Upgrades
- 25+ Years Experience Specializing In MRC Sputter Equipment
Call: (928) 476-3112 For More Information
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